POLISHING PAD AND POLISHING METHOD
There is provided a polishing pad that ensures sufficiently performing polishing up to a part near a projection portion and an inner surface of a recessed portion in a surface of an object to be polished in polishing the object to be polished having a surface with at least one of the projection port...
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Hauptverfasser: | , , , |
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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