CERAMIC SUBSTRATE AND MANUFACTURING METHOD THEREFOR

A ceramic substrate (10) having a cavity which can be used for measuring the thickness of the substrate includes a plurality of stacked ceramic substrate members (1). Each of the plurality of ceramic substrate members (1) includes a via (2) reaching the other main surface from one main surface. A ga...

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Bibliographische Detailangaben
Hauptverfasser: KONNO, Nobuaki, YOSHIDA, Yukihisa, HIRATA, Yoshiaki
Format: Patent
Sprache:eng ; fre ; ger
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