TRENCH-BASED MICROELECTROMECHANICAL TRANSDUCER AND METHOD FOR MANUFACTURING THEREOF

A microelectromechanical transducer (1; 20; 30; 50), comprising: a semiconductor body (2), having a first surface (2a) and a second surface (2b) opposite to one another; a first structural body (8), coupled to the first surface (2a) of the semiconductor body (2); a first sealed cavity (10) between t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CALTABIANO, Daniele, ROSELLI, Giuditta, POMARICO, Anna Angela, ABBASI GAVARTI, Mohammad
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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