A METHOD FOR AUTOMATICALLY ALIGNING A SCANNING TRANSMISSION ELECTRON MICROSCOPE FOR PRECESSION ELECTRON DIFFRACTION DATA MAPPING

Methods are disclosed for automatically aligning a scanning transmission electron microscope (STEM) for acquisition of precession electron diffraction (PED) mapping data at high spatial resolution.

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Bibliographische Detailangaben
Hauptverfasser:	Petras, Stanislav, Benner, Gerd Ludwig, Lencová, Bohumila, Weiss, Jon Karl
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	Methods are disclosed for automatically aligning a scanning transmission electron microscope (STEM) for acquisition of precession electron diffraction (PED) mapping data at high spatial resolution.