MAGNETIC DETECTION DEVICE

MAGNETIC DETECTION DEVICE

[Object] To provide a magnetic detection device that detects magnetic fields in X, Y, and Z directions by forming magnetoresistive elements on inclined side surfaces of recesses formed in a substrate. [Solution] A Z detection unit 10 includes magnetoresistive elements 40 (R1, R2, R3, and R4) provide...

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Sprache:eng ; fre ; ger
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ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator UMETSU, Eiji
description [Object] To provide a magnetic detection device that detects magnetic fields in X, Y, and Z directions by forming magnetoresistive elements on inclined side surfaces of recesses formed in a substrate. [Solution] A Z detection unit 10 includes magnetoresistive elements 40 (R1, R2, R3, and R4) provided on inclined side surfaces 13 and 14 of Z detection recesses 11A and 11B. An X detection unit 20 includes magnetoresistive elements 40 (R5, R6, R7, and R8) provided on inclined side surfaces 23 and 24 of X detection recesses 21A and 21B. A Y detection unit 30 includes magnetoresistive elements 40 (R9, R10, R11, and R12) provided on inclined side surfaces 33 and 34 of Y detection recesses 31A and 31B. Directions of fixed magnetization (P) of fixed magnetic layers included in the magnetoresistive elements 40 are set to directions shown by arrows with solid lines.
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subjects ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title MAGNETIC DETECTION DEVICE
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