SCANNING TRANSMISSION ELECTRON MICROSCOPE WITH A CONDENSER OBJECTIVE SYSTEM AND A METHOD OF USE THEREOF
The object of the present invention provides a scanning transmission electron microscope with the ability to adjust a beam current. The scanning transmission electron microscope comprises an electron source, which is configured to provide a primary electron beam with a cross-over, a condenser lens s...
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creator | Petras, Stanislav Benner, Gerd Ludwig Lencová, Bohumila Weiss, Jon Karl |
description | The object of the present invention provides a scanning transmission electron microscope with the ability to adjust a beam current. The scanning transmission electron microscope comprises an electron source, which is configured to provide a primary electron beam with a cross-over, a condenser lens system, an objective electromagnetic lens and a detection system. A salient feature of presented invention is the partition of the condenser system lens into the first condenser lens and the system of second and third condenser lenses. Such a partition allows to place a condenser aperture between the first condenser lens and the condenser zoom system. Presented arrangement thus allows to adjust the beam current independently on the magnification of effective spot size. |
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language | eng ; fre ; ger |
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subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY |
title | SCANNING TRANSMISSION ELECTRON MICROSCOPE WITH A CONDENSER OBJECTIVE SYSTEM AND A METHOD OF USE THEREOF |
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