SCANNING TRANSMISSION ELECTRON MICROSCOPE WITH A CONDENSER OBJECTIVE SYSTEM AND A METHOD OF USE THEREOF

The object of the present invention provides a scanning transmission electron microscope with the ability to adjust a beam current. The scanning transmission electron microscope comprises an electron source, which is configured to provide a primary electron beam with a cross-over, a condenser lens s...

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Hauptverfasser: Petras, Stanislav, Benner, Gerd Ludwig, Lencová, Bohumila, Weiss, Jon Karl
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creator Petras, Stanislav
Benner, Gerd Ludwig
Lencová, Bohumila
Weiss, Jon Karl
description The object of the present invention provides a scanning transmission electron microscope with the ability to adjust a beam current. The scanning transmission electron microscope comprises an electron source, which is configured to provide a primary electron beam with a cross-over, a condenser lens system, an objective electromagnetic lens and a detection system. A salient feature of presented invention is the partition of the condenser system lens into the first condenser lens and the system of second and third condenser lenses. Such a partition allows to place a condenser aperture between the first condenser lens and the condenser zoom system. Presented arrangement thus allows to adjust the beam current independently on the magnification of effective spot size.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title SCANNING TRANSMISSION ELECTRON MICROSCOPE WITH A CONDENSER OBJECTIVE SYSTEM AND A METHOD OF USE THEREOF
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