STAGE SYSTEM AND METROLOGY TOOL

Disclosed is a stage system and metrology apparatus comprising at least one such stage system. The stage system comprises a stage carrier for holding an object and a stage carrier positioning actuator for displacing the stage carrier. The stage system also comprises a balance mass to counteract a di...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JULIANA, Sinar, BAGGEN, Marcel, Koenraad, Marie, VAN DE GROES, Henricus, Martinus, Johannes, DE HOOG, Thomas, Jan, HEMPENIUS, Peter, Paul
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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