PRODUCTION METHOD FOR PRODUCING AN ELECTROMECHANICAL ACTUATOR AND ELECTROMECHANICAL ACTUATOR

PRODUCTION METHOD FOR PRODUCING AN ELECTROMECHANICAL ACTUATOR AND ELECTROMECHANICAL ACTUATOR

The invention relates to a production method for producing an electromechanical actuator (10), in which an electrical component (12) is provided, formed as a stack (14) of material layers (16) and electrode layers (18), and on the peripheral region (20) of which an insulation layer (30) is applied,...

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Hauptverfasser: HAUBOLD, Jörg, MEINER, Andreas, LENK, Andreas, HEINZE, Thomas, KREISSIG, Udo
Format: Patent
Sprache:eng ; fre ; ger
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ELECTRICITY
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creator HAUBOLD, Jörg
MEINER, Andreas
LENK, Andreas
HEINZE, Thomas
KREISSIG, Udo
description The invention relates to a production method for producing an electromechanical actuator (10), in which an electrical component (12) is provided, formed as a stack (14) of material layers (16) and electrode layers (18), and on the peripheral region (20) of which an insulation layer (30) is applied, wherein one electrode layer (18) in the component (12) is exposed by removing an insulation layer region (44), wherein a first removal rate (RI) for the insulation layer material (52) is selected to be significantly greater than a second removal rate (RW) for the material of the material layer (54), and wherein the second removal rate (RW) for the material of the material layer (54) is selected to be significantly greater than a third removal rate (RE) for the electrode layer material (56). The invention also relates to an electromechanical actuator (10) produced in particular using a production method of this type.
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title PRODUCTION METHOD FOR PRODUCING AN ELECTROMECHANICAL ACTUATOR AND ELECTROMECHANICAL ACTUATOR
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