MEMS SENSOR

MEMS SENSOR

A MEMS sensor (1) comprises a MEMS transducer (10) being coupled to a MEMS interface circuit (20). The MEMS interface circuit (20) comprises a bias voltage generator (100), a differential amplifier (200), a capacitor (300) and a feedback control circuit (400). The bias voltage generator (100) genera...

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Hauptverfasser: Blattmann, Rene, Niederberger, Mark, Christen, Thomas, Perktold, Lukas, Fröhlich, Thomas, Steele, Colin, Pham, Duy-Dong
Format: Patent
Sprache:eng ; fre ; ger
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AMPLIFIERS
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
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creator Blattmann, Rene
Niederberger, Mark
Christen, Thomas
Perktold, Lukas
Fröhlich, Thomas
Steele, Colin
Pham, Duy-Dong
description A MEMS sensor (1) comprises a MEMS transducer (10) being coupled to a MEMS interface circuit (20). The MEMS interface circuit (20) comprises a bias voltage generator (100), a differential amplifier (200), a capacitor (300) and a feedback control circuit (400). The bias voltage generator (100) generates a bias voltage (Vbias) for operating the MEMS transducer. The variable capacitor (300) is connected to one of the input nodes (1200a) of the differential amplifier (200). At least one of the output nodes (A200a, A200b) of the differential amplifier is coupled to a base terminal (T110) of an output filter (110) of the bias voltage generator (100). Any disturbing signal from the bias voltage generator (100) is a common-mode signal that is divided equally on the input nodes (1200a, 1200b) of the differential amplifier (200) and is therefore rejected.
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subjects AMPLIFIERS
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
title MEMS SENSOR
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