METHOD FOR DETERMINING AND COMPENSATING FOR GEOMETRIC ABERRATIONS

A method for the determination and compensation of geometric imaging errors which occur during the imaging of an object by sequential single or multispot scanning by means of a microscopic imaging system, which includes: establishing a reference object with a defined plane structure; and generating...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAASE, Daniel, KLEMM, Frank, ROSCHER, Burkhard, KAUOLD, Tobias, ANHUT, Tiemo, SCHWEDT, Daniel
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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