THREE-DIMENSIONAL SHAPE MEASUREMENT APPARATUS

A three-dimensional shape measurement apparatus includes a plurality of main pattern illumination parts, a plurality of main image-capturing parts and a control part. The main pattern illumination parts obliquely illuminate grating pattern light in different directions toward a measurement target. The main image-capturing parts obtain a grating pattern image of the measurement target by receiving reflection light of the grating pattern light that is illuminated from the main pattern illumination parts to the measurement target and obliquely reflected by the measurement target. The control part produces height data of the measurement target by using grating pattern images of the measurement target, or produces height data of the measurement target by using image positions of plane images for the measurement target and texture information of the measurement target. The control part employs a grating pattern illuminated on the measurement target as the texture information to produce height data of the measurement target. Thus, a three-dimensional shape may be measured more easily and accurately.