HIGH THERMAL CONDUCTIVITY WAFER SUPPORT PEDESTAL DEVICE

A support pedestal device for an electrostatic chuck includes a base housing defining an internal cavity, and a base insert disposed proximate the internal cavity of the base housing. A fluid pathway is formed in the internal cavity and includes a plurality of linear-parallel cooling channels separa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AMES, Ken, ATLAS, Boris, SMITH, Kevin, R, PTASIENSKI, Kevin, NOSRATI, Mohammad
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!