MODEL-BASED HOT SPOT MONITORING

Methods and systems for monitoring parameters characterizing a set of hot spot structures fabricated at different locations on a semiconductor wafer are presented herein. The hot spot structures are device structures that exhibit sensitivity to process variations and give rise to limitations on perm...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KAPASI, Sanjay, LEVY, Ady, PANDEV, Stilian, SMITH, Mark D
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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