GAS DISTRIBUTION DEVICE FOR FLUIDISED-BED REACTOR SYSTEM, FLUIDISED-BED REACTOR SYSTEM COMPRISING GAS DISTRIBUTION DEVICE, AND METHOD FOR PREPARING GRANULAR POLYSILICON USING FLUIDISED-BED REACTOR SYSTEM

The present invention relates to a gas distribution unit for a fluidized bed reactor system, a fluidized bed reactor system having the gas distribution unit, and a method for preparing granular polysilicon using the fluidized bed reactor system. The gas distribution unit for a fluidized bed reactor...

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Hauptverfasser: AHN, Gui Ryong, HAN, Joo Hee, LEE, Won Ik, KIM, Gil Ho, KIM, Sang Ah, KIM, Ji Ho
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Sprache:eng ; fre ; ger
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creator AHN, Gui Ryong
HAN, Joo Hee
LEE, Won Ik
KIM, Gil Ho
KIM, Sang Ah
KIM, Ji Ho
description The present invention relates to a gas distribution unit for a fluidized bed reactor system, a fluidized bed reactor system having the gas distribution unit, and a method for preparing granular polysilicon using the fluidized bed reactor system. The gas distribution unit for a fluidized bed reactor system according to the present invention enables gas flow rate control and gas composition control for each zone within the plenum chamber. In addition, a fluidized bed reactor system having the gas distribution unit enables shape control of a fluidized bed (in particular, transition between a bubbling fluidized bed and a spout fluidized bed). The method for preparing granular polysilicon using the fluidized bed reactor system not only simultaneously improves process stability and productivity, but also enables more flexible handling in the event of an abnormal situation.
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The gas distribution unit for a fluidized bed reactor system according to the present invention enables gas flow rate control and gas composition control for each zone within the plenum chamber. In addition, a fluidized bed reactor system having the gas distribution unit enables shape control of a fluidized bed (in particular, transition between a bubbling fluidized bed and a spout fluidized bed). 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The gas distribution unit for a fluidized bed reactor system according to the present invention enables gas flow rate control and gas composition control for each zone within the plenum chamber. In addition, a fluidized bed reactor system having the gas distribution unit enables shape control of a fluidized bed (in particular, transition between a bubbling fluidized bed and a spout fluidized bed). The method for preparing granular polysilicon using the fluidized bed reactor system not only simultaneously improves process stability and productivity, but also enables more flexible handling in the event of an abnormal situation.</abstract><oa>free_for_read</oa></addata></record>
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subjects BLASTING
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
COMPOUNDS THEREOF
DIFFUSION TREATMENT OF METALLIC MATERIAL
FURNACES
FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL
HEATING
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
INORGANIC CHEMISTRY
KILNS
LIGHTING
MECHANICAL ENGINEERING
METALLURGY
NON-METALLIC ELEMENTS
OPEN SINTERING OR LIKE APPARATUS
OVENS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
RETORTS
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
THEIR RELEVANT APPARATUS
TRANSPORTING
WEAPONS
title GAS DISTRIBUTION DEVICE FOR FLUIDISED-BED REACTOR SYSTEM, FLUIDISED-BED REACTOR SYSTEM COMPRISING GAS DISTRIBUTION DEVICE, AND METHOD FOR PREPARING GRANULAR POLYSILICON USING FLUIDISED-BED REACTOR SYSTEM
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