PRODUCTION METHOD FOR A POLYCRYSTALLINE SILICON ROD

A plate-shaped sample with a cross-section perpendicular to a radial direction of a polycrystalline silicon rod as a principal surface is sampled from a region from a center (r=0) of the polycrystalline silicon rod to R/3. Then, the sample is disposed at a position at which a Bragg reflection from a...

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Bibliographische Detailangaben
Hauptverfasser: MIYAO, Shuichi, NETSU, Shigeyoshi
Format: Patent
Sprache:eng ; fre ; ger
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