THERMAL FLUID FLOW-RATE SENSOR

Degradation of reliability of a thermal fluid flow sensor, caused by generation of a crack in an insulating film is prevented in the thermal fluid flow sensor including a detection section and a circuit section formed on the same substrate when stress adjustment is performed by forming a deep concav...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ONOSE, Yasuo, DOI, Ryosuke, SAKUMA, Noriyuki, TASHIRO, Shinobu
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS TESTING TRANSPORTING
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