CAPACITIVE RF MEMS INTENDED FOR HIGH-POWER APPLICATIONS

According to one aspect of the invention, there is proposed a capacitive radiofrequency MicroElectroMechanical System or capacitive RF MEMS comprising a metallic membrane suspended above an RF transmission line and resting on ground planes, and exhibiting a lower face, an upper face opposite to the...

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Hauptverfasser:	ZIAEI, Afshin, LE BAILLIF, Matthieu, MARTINS, Paolo, BANSROPUN, Shailendra
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE TRANSPORTING WAVEGUIDES
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creator	ZIAEI, Afshin LE BAILLIF, Matthieu MARTINS, Paolo BANSROPUN, Shailendra
description	According to one aspect of the invention, there is proposed a capacitive radiofrequency MicroElectroMechanical System or capacitive RF MEMS comprising a metallic membrane suspended above an RF transmission line and resting on ground planes, and exhibiting a lower face, an upper face opposite to the lower face and a first layer comprising a refractory metallic material at least partially covering the upper face of the membrane so as to prevent the heating of the membrane.
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fullrecord	<record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP3237324B1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP3237324B1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP3237324B13</originalsourceid><addsrcrecordid>eNrjZDB3dgxwdPYM8QxzVQhyU_B19Q1W8PQLcfVzcXVRcPMPUvDwdPfQDfAPdw1ScAwI8PF0dgzx9PcL5mFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8a4BxkbG5sZGJk6GxkQoAQDdUyeu</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>CAPACITIVE RF MEMS INTENDED FOR HIGH-POWER APPLICATIONS</title><source>esp@cenet</source><creator>ZIAEI, Afshin ; LE BAILLIF, Matthieu ; MARTINS, Paolo ; BANSROPUN, Shailendra</creator><creatorcontrib>ZIAEI, Afshin ; LE BAILLIF, Matthieu ; MARTINS, Paolo ; BANSROPUN, Shailendra</creatorcontrib><description>According to one aspect of the invention, there is proposed a capacitive radiofrequency MicroElectroMechanical System or capacitive RF MEMS comprising a metallic membrane suspended above an RF transmission line and resting on ground planes, and exhibiting a lower face, an upper face opposite to the lower face and a first layer comprising a refractory metallic material at least partially covering the upper face of the membrane so as to prevent the heating of the membrane.</description><language>eng ; fre ; ger</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRICITY ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE ; TRANSPORTING ; WAVEGUIDES</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220518&DB=EPODOC&CC=EP&NR=3237324B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220518&DB=EPODOC&CC=EP&NR=3237324B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ZIAEI, Afshin</creatorcontrib><creatorcontrib>LE BAILLIF, Matthieu</creatorcontrib><creatorcontrib>MARTINS, Paolo</creatorcontrib><creatorcontrib>BANSROPUN, Shailendra</creatorcontrib><title>CAPACITIVE RF MEMS INTENDED FOR HIGH-POWER APPLICATIONS</title><description>According to one aspect of the invention, there is proposed a capacitive radiofrequency MicroElectroMechanical System or capacitive RF MEMS comprising a metallic membrane suspended above an RF transmission line and resting on ground planes, and exhibiting a lower face, an upper face opposite to the lower face and a first layer comprising a refractory metallic material at least partially covering the upper face of the membrane so as to prevent the heating of the membrane.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRICITY</subject><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE</subject><subject>TRANSPORTING</subject><subject>WAVEGUIDES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDB3dgxwdPYM8QxzVQhyU_B19Q1W8PQLcfVzcXVRcPMPUvDwdPfQDfAPdw1ScAwI8PF0dgzx9PcL5mFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8a4BxkbG5sZGJk6GxkQoAQDdUyeu</recordid><startdate>20220518</startdate><enddate>20220518</enddate><creator>ZIAEI, Afshin</creator><creator>LE BAILLIF, Matthieu</creator><creator>MARTINS, Paolo</creator><creator>BANSROPUN, Shailendra</creator><scope>EVB</scope></search><sort><creationdate>20220518</creationdate><title>CAPACITIVE RF MEMS INTENDED FOR HIGH-POWER APPLICATIONS</title><author>ZIAEI, Afshin ; LE BAILLIF, Matthieu ; MARTINS, Paolo ; BANSROPUN, Shailendra</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP3237324B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2022</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRICITY</topic><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE</topic><topic>TRANSPORTING</topic><topic>WAVEGUIDES</topic><toplevel>online_resources</toplevel><creatorcontrib>ZIAEI, Afshin</creatorcontrib><creatorcontrib>LE BAILLIF, Matthieu</creatorcontrib><creatorcontrib>MARTINS, Paolo</creatorcontrib><creatorcontrib>BANSROPUN, Shailendra</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ZIAEI, Afshin</au><au>LE BAILLIF, Matthieu</au><au>MARTINS, Paolo</au><au>BANSROPUN, Shailendra</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>CAPACITIVE RF MEMS INTENDED FOR HIGH-POWER APPLICATIONS</title><date>2022-05-18</date><risdate>2022</risdate><abstract>According to one aspect of the invention, there is proposed a capacitive radiofrequency MicroElectroMechanical System or capacitive RF MEMS comprising a metallic membrane suspended above an RF transmission line and resting on ground planes, and exhibiting a lower face, an upper face opposite to the lower face and a first layer comprising a refractory metallic material at least partially covering the upper face of the membrane so as to prevent the heating of the membrane.</abstract><oa>free_for_read</oa></addata></record>
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recordid	cdi_epo_espacenet_EP3237324B1
source	esp@cenet
subjects	BASIC ELECTRIC ELEMENTS ELECTRICITY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE TRANSPORTING WAVEGUIDES
title	CAPACITIVE RF MEMS INTENDED FOR HIGH-POWER APPLICATIONS
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