METHOD OF FORMING PIEZO DRIVER ELECTRODES

A method for forming piezoelectric transducers for inkjet printheads includes: forming at least one piezoelectric layer on a substrate; forming at least one electrode pattern by depositing a conductive material on an exposed surface of the at least one piezoelectric layer; and forming a plurality of...

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Bibliographische Detailangaben
Hauptverfasser: REDDING, Gary D, CELLURA, Mark A, NYSTROM, Peter J, GULVIN, Peter M
Format: Patent
Sprache:eng ; fre ; ger
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