POLYCRYSTALLINE SILICON, FZ SINGLE CRYSTAL SILICON, AND METHOD FOR PRODUCING THE SAME

When FZ single crystal silicon is produced from polycrystalline silicon, which is synthesized by the Siemens method followed by being subjected to thermal treatment and includes crystal grains having a Miller index plane or as a principal plane and grown by the thermal treatment, and in which the X-...

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Bibliographische Detailangaben
Hauptverfasser: Miyao, Shuichi, Netsu, Shigeyoshi
Format: Patent
Sprache:eng ; fre ; ger
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