BAW RESONATOR WITH REDUCED HEAT BUILD-UP, HF FILTER COMPRISING BAW RESONATOR, DUPLEXER COMPRISING HF FILTER, AND PRODUCTION METHOD
The invention relates to a BAW resonator with reduced heat build-up. The heat build-up is reduced by a thermal bridge, which dissipates heat from the electro-acoustically active region to a support substrate, without impairing the acoustics of the resonator.
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | The invention relates to a BAW resonator with reduced heat build-up. The heat build-up is reduced by a thermal bridge, which dissipates heat from the electro-acoustically active region to a support substrate, without impairing the acoustics of the resonator. |
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