BAW RESONATOR WITH REDUCED HEAT BUILD-UP, HF FILTER COMPRISING BAW RESONATOR, DUPLEXER COMPRISING HF FILTER, AND PRODUCTION METHOD

The invention relates to a BAW resonator with reduced heat build-up. The heat build-up is reduced by a thermal bridge, which dissipates heat from the electro-acoustically active region to a support substrate, without impairing the acoustics of the resonator.

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Bibliographische Detailangaben
Hauptverfasser: PITSCHI, Maximilian, BADER, Bernhard, TAG, Andreas
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:The invention relates to a BAW resonator with reduced heat build-up. The heat build-up is reduced by a thermal bridge, which dissipates heat from the electro-acoustically active region to a support substrate, without impairing the acoustics of the resonator.