THERMAL FLOW SENSOR

The invention relates to a thermal flow sensor which is fabricated at a low cost and has improved reliability. Over a cavity (7) formed in a semiconductor substrate (2), at least a heating resistance (4) is formed near the center of the cavity with an electrical insulation film interposed between th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAKADA, Keiichi, HORIE, Junichi, WATANABE, Izumi, YAMADA, Masamichi
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS TESTING
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