MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION APPARATUS, METHOD FOR MANUFACTURING STRUCTURE, MEASUREMENT PROCESSING METHOD, X-RAY INSPECTION METHOD, MEASUREMENT PROCESSING PROGRAM, AND X-RAY INSPECTION PROGRAM

MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION APPARATUS, METHOD FOR MANUFACTURING STRUCTURE, MEASUREMENT PROCESSING METHOD, X-RAY INSPECTION METHOD, MEASUREMENT PROCESSING PROGRAM, AND X-RAY INSPECTION PROGRAM

A measurement processing device used for an x-ray inspection apparatus that detects an x-ray passing through a predetermined region of a specimen placed on a placement unit to perform an inspection on the shape of the predetermined region of the specimen includes: a setting unit for setting a three-...

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Hauptverfasser: KAWAI, Akitoshi, MACHII, Nobukatsu, HAYANO, Fuminori
Format: Patent
Sprache:eng ; fre ; ger
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator KAWAI, Akitoshi
MACHII, Nobukatsu
HAYANO, Fuminori
description A measurement processing device used for an x-ray inspection apparatus that detects an x-ray passing through a predetermined region of a specimen placed on a placement unit to perform an inspection on the shape of the predetermined region of the specimen includes: a setting unit for setting a three-dimensional region to be detected on the specimen; and a sliced-region selection unit for setting a plurality of sliced regions on the region to be detected, calculating, for each of the plurality of sliced regions, an amount of displacement of the predetermined region that is required to detect the region to be detected when the plurality of sliced regions is regarded as the predetermined region, and selecting a sliced region for the inspection from among the plurality of sliced regions on the basis of each of the calculated amounts of displacement.
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION APPARATUS, METHOD FOR MANUFACTURING STRUCTURE, MEASUREMENT PROCESSING METHOD, X-RAY INSPECTION METHOD, MEASUREMENT PROCESSING PROGRAM, AND X-RAY INSPECTION PROGRAM
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