SENSOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE DEVICE MANUFACTURING METHOD
A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers ar...
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| creator | DE BEST, Jeroen Johannes Theodorus Hendrikus VAN LIESHOUT, Richard, Henricus, Adrianus VAN DER KRIEKEN, Peter AKKERMANS, Johannes, Antonius, Gerardus HEEREN, Adrianus, Marinus, Wouter BEERENS, Ruud, Antonius, Catharina, Maria LEENKNEGT, George, Alois, Leonie SCHELLENS, Hendrikus, Johannes BROERS, Sander, Christiaan LENSSEN, Bo CADEE, Theodorus, Petrus, Maria VAN EIJK, Jan |
| description | A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured. |
| format | Patent |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MATERIALS THEREFOR MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES TESTING |
| title | SENSOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE DEVICE MANUFACTURING METHOD |
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