METHOD AND SYSTEM FOR CONVERGENT POLISHING

A method of mounting a workpiece to a substrate is disclosed, the method comprising: determining a peak-to-valley height value; determining a value related to pitch area; computing a relative area of pitch; computing a button radius; computing a number of pitch buttons; coupling the computed number,...

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Hauptverfasser: WONG, Lana L, DYLLA-SPEARS, Rebecca J, STEELE, William A, DESJARDIN, Richard P, GERAGHTY, Paul, BUDE, Jeffrey D, SURATWALA, Tayyab I, FEIT, Michael D, MILLER, Philip E, MASON, Daniel C
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creator WONG, Lana L
DYLLA-SPEARS, Rebecca J
STEELE, William A
DESJARDIN, Richard P
GERAGHTY, Paul
BUDE, Jeffrey D
SURATWALA, Tayyab I
FEIT, Michael D
MILLER, Philip E
MASON, Daniel C
description A method of mounting a workpiece to a substrate is disclosed, the method comprising: determining a peak-to-valley height value; determining a value related to pitch area; computing a relative area of pitch; computing a button radius; computing a number of pitch buttons; coupling the computed number, N, of pitch buttons to the workpiece; and coupling the N pitch buttons to the substrate. Also disclosed is a slurry system for polishing an optical element, the slurry system comprising: a solvent; an abrasive component supported in the solvent; and a surfactant supported in the solvent.
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subjects DRESSING OR CONDITIONING OF ABRADING SURFACES
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
TRANSPORTING
title METHOD AND SYSTEM FOR CONVERGENT POLISHING
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