SENSOR DEVICE

The purpose of the present invention is to provide a highly accurate and highly reliable physical quantity sensor wherein an error due to stress applied to a sensor element of the physical quantity sensor is reduced. This physical quantity sensor device is provided with: a hollow section formed in a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YANAGAWA Yoshimitsu, MATSUMOTO Masahiro, ONOSE Yasuo, NAKANO Hiroshi
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ELECTRICITY MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS TESTING
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