DESIGN FOR STORING AND ORGANIZING MINIMUM CONTACT AREA FEATURES AND WAFER TRANSFER PINS DURING SYSTEM MAINTENANCE

A tray for storing minimum contact area (MCA) components of a substrate processing system includes a first compartment including at least one of a first lift pin tray and a first plurality of holes. The first lift pin tray includes a plurality of slots configured to retain lift pins of the substrate...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BERNIER, Terrence George, WEI, Joseph
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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