DESIGN FOR STORING AND ORGANIZING MINIMUM CONTACT AREA FEATURES AND WAFER TRANSFER PINS DURING SYSTEM MAINTENANCE

DESIGN FOR STORING AND ORGANIZING MINIMUM CONTACT AREA FEATURES AND WAFER TRANSFER PINS DURING SYSTEM MAINTENANCE

A tray for storing minimum contact area (MCA) components of a substrate processing system includes a first compartment including at least one of a first lift pin tray and a first plurality of holes. The first lift pin tray includes a plurality of slots configured to retain lift pins of the substrate...

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Hauptverfasser: BERNIER, Terrence George, WEI, Joseph
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator BERNIER, Terrence George
WEI, Joseph
description A tray for storing minimum contact area (MCA) components of a substrate processing system includes a first compartment including at least one of a first lift pin tray and a first plurality of holes. The first lift pin tray includes a plurality of slots configured to retain lift pins of the substrate processing system. The first plurality of holes is configured to receive MCA pins of the substrate processing system. A first cup is arranged adjacent to the first compartment. The first cup includes a wall at least partially surrounding the first cup, the wall separates the first cup from the first compartment, and an upper edge of the wall extends above a bottom surface of the first compartment.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title DESIGN FOR STORING AND ORGANIZING MINIMUM CONTACT AREA FEATURES AND WAFER TRANSFER PINS DURING SYSTEM MAINTENANCE
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