LASER IRRADIATION DEVICE

This is to provide a laser irradiation apparatus which can drive a deflection optical system (33) with a high speed by a small and lightweight structure and can cope with heat generation of the optical system. The laser irradiation apparatus comprises a condensing optical system (32) for condensing...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KUROYANAGI, Akihiro, TOYOSAWA, Kazuaki, OKIHARA, Shinichiro, FUJITA, Kazuhisa
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:This is to provide a laser irradiation apparatus which can drive a deflection optical system (33) with a high speed by a small and lightweight structure and can cope with heat generation of the optical system. The laser irradiation apparatus comprises a condensing optical system (32) for condensing a laser beam (B) generated by a laser oscillator (10) at a predetermined focal point (FP), a deflection optical system (33) for deflecting the laser beam (B) generated from the condensing optical system (32) with a predetermined deflection angle, and a driving means (100) for rotationally driving the deflection optical system (33) around a rotation axis provided substantially in parallel to an optical axis of the condensing optical system (32), wherein the driving means (100) has an air motor (100) which convert an energy possessed by a gas supplied from a gas supplying source (60) to a rotational force.