OBJECT MOVING DEVICE

An object moving device includes: a first drive mechanism configured to move a head unit in a first direction and in a second direction that is orthogonal to the first direction in a horizontal direction; a second drive mechanism configured to move an illumination unit in the first direction; a thir...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: IZUME, Yohei, ITO, Saburo, OSADA, Yukimasa
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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