DEVICE FOR MASK PROJECTION OF FEMTOSECOND AND PICOSECOND LASER BEAMS WITH A BLADE, A MASK AND LENSES' SYSTEMS
The present application relates to a device for the mask projection of femtosecond or picosecond laser beams (2) onto a substrate surface, in which the laser beam (2) consisting of laser beam pulses is, at a location of the optical axis, formed to make laser beam pulses with an expanded laser beam c...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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