DEVICE FOR MASK PROJECTION OF FEMTOSECOND AND PICOSECOND LASER BEAMS WITH A BLADE, A MASK AND LENSES' SYSTEMS

The present application relates to a device for the mask projection of femtosecond or picosecond laser beams (2) onto a substrate surface, in which the laser beam (2) consisting of laser beam pulses is, at a location of the optical axis, formed to make laser beam pulses with an expanded laser beam c...

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Bibliographische Detailangaben
Hauptverfasser: PFEIFFER, Manuel, KRATSCH, Alexander, REISSE, Günter, BOEGLI, Charles, KAHL, Matthias, ENGEL, Andy, WEISSMANTEL, Steffen
Format: Patent
Sprache:eng ; fre ; ger
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