EXPOSURE HEAD, EXPOSURE APPARATUS AND METHOD OF OPERATING AN EXPOSURE HEAD

The invention is directed at an exposure head for use in an exposure apparatus for illuminating a surface, the exposure head comprising one or more radiative sources for providing one or more beams, an optical scanning unit arranged for receiving the one or more beams and for directing the beams tow...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAN ZWET, Erwin John, MAALDERINK, Herman Hendrikus, STARMANS, Henri Jacques Antoine Jean, MEINDERS, Erwin Rinaldo, GIESEN, Peter Theodorus Maria, JAMAR, Jacobus Hubertus Theodoor
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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