A MEMS AIRFLOW SENSOR DIE INCORPORATING ADDITIONAL CIRCUITRY ON THE DIE

A MEMS airflow sensor die having a heater control circuit, differential instrumentation amplifier, temperature compensation, and/or offset correction circuitry integrated with an airflow sensor on the MEMS die. The added circuitry may be placed on space available on the basic airflow die with MEMS f...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RICKS, Lamar Floyd, QASIMI, Mohammed Abdul Javvad
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS TESTING
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