CMUT DEVICE AND MANUFACTURING METHOD

Disclosed is a method of manufacturing a device (1) comprising a plurality of micro-machined ultrasonic transducer cells (100) in a first region (10) on a substrate (30) and a plurality of interconnects (200) in a second region (20) on said substrate, each of said cells comprising a first electrode...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MARCELIS, Bout, MAUCZOK, Ruediger
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS TRANSPORTING
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