VIEW PORT FOR OBSERVING INGOT GROWTH PROCESS AND INGOT GROWTH APPARATUS INCLUDING SAME
A view port for observing ingot growth process of the present embodiment is as a view port for observing the inside of a chamber providing a space in which a growth process of an ingot is performed includes a body part disposed on the a side of the chamber and having a hole connected to the inside o...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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