DEFECT INSPECTION SYSTEM AND METHOD

A defect inspection system is provided for inspection of defects in the surface of a sample. An array of light sources is used, with different light sources providing light to the sample from different directions. A main direction of illumination is defined with highest intensity, and this direction...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHOU, Weixi, JAEGER, Mark Christoph, KUAI, Shuguang
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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