ETCHANT SOLUTIONS AND METHOD OF USE THEREOF

Etching compositions and method of using the etching compositions comprising potassium hydroxide; one or more than one additional alkaline compounds selected from the group consisting of TEAH, TMAF and NH 4 OH; and water; or etching compositions comprising one or more than one inorganic alkali basic...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN, Tianniu, CASTEEL, Jr., William Jack, PARRIS, Gene Everad
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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