METHOD OF MAKING A NANOSTRUCTURE

A method of making a nanostructure and nanostructured articles by depositing a layer to a major surface of a substrate by plasma chemical vapor deposition from a gaseous mixture while substantially simultaneously etching the surface with a reactive species. The method includes providing a substrate;...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SETH, Jayshree, FRANKE, Carsten, DAVID, Moses M, ZEHENTMAIER, Sebastian F, YU, Ta-Hua, BERGER, Michael S, BATES, Daniel S
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MANUFACTURE OR TREATMENT THEREOF NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS NANOTECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!