DEVICE AND METHOD FOR ALIGNING SUBSTRATES

A method for alignment and contact-making of a first substrate with a second substrate using several detection units as well as a corresponding device.

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Bibliographische Detailangaben
1. Verfasser: THALLNER, Erich
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A method for alignment and contact-making of a first substrate with a second substrate using several detection units as well as a corresponding device.