DEVICE AND METHOD FOR ALIGNING SUBSTRATES
A method for alignment and contact-making of a first substrate with a second substrate using several detection units as well as a corresponding device.
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A method for alignment and contact-making of a first substrate with a second substrate using several detection units as well as a corresponding device. |
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