THIN FILM FABRICATING APPARATUS

THIN FILM FABRICATING APPARATUS

A thin film fabricating apparatus includes: an electrode bath (6) which contains a thin film-forming material (5); a plurality of needle electrodes (4) disposed in the electrode bath (6); a plurality of ring electrodes (3) disposed on the electrode bath (6) at positions corresponding to the needle e...

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Hauptverfasser: NOBUO, HAMAMOTO, HIROSHI, MIYAZAKI
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
ATOMISING APPARATUS
ELECTRICITY
NOZZLES
PERFORMING OPERATIONS
SPRAYING APPARATUS
SPRAYING OR ATOMISING IN GENERAL
TRANSPORTING
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creator NOBUO, HAMAMOTO
HIROSHI, MIYAZAKI
description A thin film fabricating apparatus includes: an electrode bath (6) which contains a thin film-forming material (5); a plurality of needle electrodes (4) disposed in the electrode bath (6); a plurality of ring electrodes (3) disposed on the electrode bath (6) at positions corresponding to the needle electrodes (4); and a substrate stand (1) disposed opposite to the needle electrodes (4) and the ring electrodes (3), where the substrate stand holds the substrate (2), on which a thin film is to be formed.
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subjects APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
ATOMISING APPARATUS
ELECTRICITY
NOZZLES
PERFORMING OPERATIONS
SPRAYING APPARATUS
SPRAYING OR ATOMISING IN GENERAL
TRANSPORTING
title THIN FILM FABRICATING APPARATUS
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