A METHOD OF FORMING SUBSTRATES WITH HIGH SURFACE AREA NANOCOATINGS AND NANOSTRUCTURE
The present invention relates to a method for forming substrates with high surface area nanocoatings of semiconductor and/or dielectric materials, wherein it comprises the following steps: a) on a substrate, preferably a silicon, quartz, or gallium nitride substrate, a textured layer is formed, pref...
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| creator | GIERALTOWSKA, SYLWIA GODLEWSKI, MAREK WACHNICKI, LUKASZ KOPALKO, KRZYSZTOF WITKOWSKI, BART OMIEJ |
| description | The present invention relates to a method for forming substrates with high surface area nanocoatings of semiconductor and/or dielectric materials, wherein it comprises the following steps: a) on a substrate, preferably a silicon, quartz, or gallium nitride substrate, a textured layer is formed, preferably comprising nanorods, nanodots or nanowires, fixed to the substrate; b) on the textured layer in step a) a semiconductor and/or dielectric nanocoating is deposited; c) after deposition of nanocoating in step b) the textured layer are removed and the nanostructure. |
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b) on the textured layer in step a) a semiconductor and/or dielectric nanocoating is deposited; c) after deposition of nanocoating in step b) the textured layer are removed and the nanostructure.</description><language>eng ; fre ; ger</language><subject>AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE ; APPARATUS THEREFOR ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; CRYSTAL GROWTH ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES ; METALLURGY ; NANOTECHNOLOGY ; PERFORMING OPERATIONS ; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE ; REFINING BY ZONE-MELTING OF MATERIAL ; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE ; SINGLE-CRYSTAL-GROWTH ; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION ; TRANSPORTING ; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL</subject><creationdate>2016</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160323&DB=EPODOC&CC=EP&NR=2997176A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160323&DB=EPODOC&CC=EP&NR=2997176A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>GIERALTOWSKA, SYLWIA</creatorcontrib><creatorcontrib>GODLEWSKI, MAREK</creatorcontrib><creatorcontrib>WACHNICKI, LUKASZ</creatorcontrib><creatorcontrib>KOPALKO, KRZYSZTOF</creatorcontrib><creatorcontrib>WITKOWSKI, BART OMIEJ</creatorcontrib><title>A METHOD OF FORMING SUBSTRATES WITH HIGH SURFACE AREA NANOCOATINGS AND NANOSTRUCTURE</title><description>The present invention relates to a method for forming substrates with high surface area nanocoatings of semiconductor and/or dielectric materials, wherein it comprises the following steps: a) on a substrate, preferably a silicon, quartz, or gallium nitride substrate, a textured layer is formed, preferably comprising nanorods, nanodots or nanowires, fixed to the substrate; 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GODLEWSKI, MAREK ; WACHNICKI, LUKASZ ; KOPALKO, KRZYSZTOF ; WITKOWSKI, BART OMIEJ</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP2997176A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2016</creationdate><topic>AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE</topic><topic>APPARATUS THEREFOR</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>CRYSTAL GROWTH</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>MANUFACTURE OR TREATMENT OF NANOSTRUCTURES</topic><topic>MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES</topic><topic>METALLURGY</topic><topic>NANOTECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE</topic><topic>REFINING BY ZONE-MELTING OF MATERIAL</topic><topic>SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE</topic><topic>SINGLE-CRYSTAL-GROWTH</topic><topic>SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><topic>TRANSPORTING</topic><topic>UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL</topic><toplevel>online_resources</toplevel><creatorcontrib>GIERALTOWSKA, SYLWIA</creatorcontrib><creatorcontrib>GODLEWSKI, MAREK</creatorcontrib><creatorcontrib>WACHNICKI, LUKASZ</creatorcontrib><creatorcontrib>KOPALKO, KRZYSZTOF</creatorcontrib><creatorcontrib>WITKOWSKI, BART OMIEJ</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>GIERALTOWSKA, SYLWIA</au><au>GODLEWSKI, MAREK</au><au>WACHNICKI, LUKASZ</au><au>KOPALKO, KRZYSZTOF</au><au>WITKOWSKI, BART OMIEJ</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>A METHOD OF FORMING SUBSTRATES WITH HIGH SURFACE AREA NANOCOATINGS AND NANOSTRUCTURE</title><date>2016-03-23</date><risdate>2016</risdate><abstract>The present invention relates to a method for forming substrates with high surface area nanocoatings of semiconductor and/or dielectric materials, wherein it comprises the following steps: a) on a substrate, preferably a silicon, quartz, or gallium nitride substrate, a textured layer is formed, preferably comprising nanorods, nanodots or nanowires, fixed to the substrate; b) on the textured layer in step a) a semiconductor and/or dielectric nanocoating is deposited; c) after deposition of nanocoating in step b) the textured layer are removed and the nanostructure.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| subjects | AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES METALLURGY NANOTECHNOLOGY PERFORMING OPERATIONS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL |
| title | A METHOD OF FORMING SUBSTRATES WITH HIGH SURFACE AREA NANOCOATINGS AND NANOSTRUCTURE |
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