METHOD FOR PRODUCING HIGH-FREQUENCY POWER AND POWER SUPPLY SYSTEM HAVING A POWER CONVERTER FOR SUPPLYING A LOAD WITH POWER
A power-supply system has a power converter configured to generate a high-frequency power signal and supply the high-frequency power signal to a load such as a plasma or gas laser process. The power converter includes a digital-to-analog converter (DAC) configured to generate an analog signal from a...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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