TRANSPARENT VAPOR-DEPOSITED FILM

Employed is a roller-type continuous vapor-deposited film forming device in which a film-forming section and a preprocessing section provided with a plasma preprocessing device are arranged in series at a distance from each other. With a substrate transported at a high speed, plasma (P) is supplied...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MATSUI, SHIGEKI, MIYAMA, HIROSHI, ASUMA, TATSUO, MATSUZAKI, HIROSHI, KOMURO, TERUHISA, MIYAZAKI, KAORU, GOTO, TAKAKAZU
Format: Patent
Sprache:eng ; fre ; ger
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