PREPARING METHOD OF ANTI-REFLECTION FILM HAVING ANTI-PID EFFECT

Provided is a preparing method of anti-reflection film having anti-PID effect. The method comprises: vacuumizing a furnace tube, holding the temperature in the furnace at 420°C and the pressure as 80 mTorr for 4 minutes; pretreating a silicon slice at 420°C with a nitrous oxide flux of 3.8-4.4 slm a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LU, CHUNHUI, WU, JUNQING, HOU, ZERONG, HUANG, LUN, WANG, JINWEI
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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