SENSOR WITH A VIBRATING MEMBER IN A CAVITY, WITH INTEGRATED ANOMALY DETECTION

The invention relates to vibrating micro-systems, and notably but not exclusively to pressure, acceleration, or angular speed micro-sensors with a resonator in an evacuated cavity. The resonator (10) with a vibrating element is placed in an oscillating circuit controlled by a closed-loop control, th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PLANCHETTE, YANN, QUER, RÉGIS, MUGUET, JEAN-MICHEL
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TARIFF METERING APPARATUS TESTING
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