TRANSPORT AND HANDING-OVER ARRANGEMENT FOR DISC-SHAPED SUBSTRATES, VACUUM TREATMENT INSTALLATION AND METHOD FOR MANUFACTURE OF TREATED SUBSTRATES
A transport and handing-over arrangement for disc shaped substrates, comprising a carrier (3) and a take-over arrangement (15). Both are moveable relative to each other. A relatively heavy substrate carrier (7) of magnetisable material is taken-over from the take-over arrangement (15) by distance co...
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| creator | MATTEACCI, Pierre VOSER, Stephan GAECHTER, Bruno |
| description | A transport and handing-over arrangement for disc shaped substrates, comprising a carrier (3) and a take-over arrangement (15). Both are moveable relative to each other. A relatively heavy substrate carrier (7) of magnetisable material is taken-over from the take-over arrangement (15) by distance control of a permanent magnet (17) at the take-over arrangement (15) or is returned therefrom to a carrier (3). The controlled drive of the permanent magnets (17) in the take-over arrangement (15) is performed by means of pneumatic piston/cylinder arrangements (19). |
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Both are moveable relative to each other. A relatively heavy substrate carrier (7) of magnetisable material is taken-over from the take-over arrangement (15) by distance control of a permanent magnet (17) at the take-over arrangement (15) or is returned therefrom to a carrier (3). The controlled drive of the permanent magnets (17) in the take-over arrangement (15) is performed by means of pneumatic piston/cylinder arrangements (19).</description><language>eng ; fre ; ger</language><subject>BASIC ELECTRIC ELEMENTS ; CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; PERFORMING OPERATIONS ; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL ; SEMICONDUCTOR DEVICES ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION ; TRANSPORTING</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201007&DB=EPODOC&CC=EP&NR=2862200B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201007&DB=EPODOC&CC=EP&NR=2862200B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>MATTEACCI, Pierre</creatorcontrib><creatorcontrib>VOSER, Stephan</creatorcontrib><creatorcontrib>GAECHTER, Bruno</creatorcontrib><title>TRANSPORT AND HANDING-OVER ARRANGEMENT FOR DISC-SHAPED SUBSTRATES, VACUUM TREATMENT INSTALLATION AND METHOD FOR MANUFACTURE OF TREATED SUBSTRATES</title><description>A transport and handing-over arrangement for disc shaped substrates, comprising a carrier (3) and a take-over arrangement (15). Both are moveable relative to each other. A relatively heavy substrate carrier (7) of magnetisable material is taken-over from the take-over arrangement (15) by distance control of a permanent magnet (17) at the take-over arrangement (15) or is returned therefrom to a carrier (3). The controlled drive of the permanent magnets (17) in the take-over arrangement (15) is performed by means of pneumatic piston/cylinder arrangements (19).</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjLEOgjAURVkcjPoP7wMkQUyM66N9QBPakvaVlRBTJ6Mk-CP-sQRd3FzuHe65Z5282KHxrXUMaCTUcyhTpbYjB-jmrSJNhqG0DqTyIvU1tiTBh8LPVya_hw5FCBrYEfICK-MZmwZZWbNoNXFt5SLRaEKJgoMjsOXn9OPbJqvrcJvi7tubBEpiUadxfPRxGodLvMdnT21-PuV5lhWH4x_IG14mQOM</recordid><startdate>20201007</startdate><enddate>20201007</enddate><creator>MATTEACCI, Pierre</creator><creator>VOSER, Stephan</creator><creator>GAECHTER, Bruno</creator><scope>EVB</scope></search><sort><creationdate>20201007</creationdate><title>TRANSPORT AND HANDING-OVER ARRANGEMENT FOR DISC-SHAPED SUBSTRATES, VACUUM TREATMENT INSTALLATION AND METHOD FOR MANUFACTURE OF TREATED SUBSTRATES</title><author>MATTEACCI, Pierre ; VOSER, Stephan ; GAECHTER, Bruno</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP2862200B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2020</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>MATTEACCI, Pierre</creatorcontrib><creatorcontrib>VOSER, Stephan</creatorcontrib><creatorcontrib>GAECHTER, Bruno</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>MATTEACCI, Pierre</au><au>VOSER, Stephan</au><au>GAECHTER, Bruno</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>TRANSPORT AND HANDING-OVER ARRANGEMENT FOR DISC-SHAPED SUBSTRATES, VACUUM TREATMENT INSTALLATION AND METHOD FOR MANUFACTURE OF TREATED SUBSTRATES</title><date>2020-10-07</date><risdate>2020</risdate><abstract>A transport and handing-over arrangement for disc shaped substrates, comprising a carrier (3) and a take-over arrangement (15). Both are moveable relative to each other. A relatively heavy substrate carrier (7) of magnetisable material is taken-over from the take-over arrangement (15) by distance control of a permanent magnet (17) at the take-over arrangement (15) or is returned therefrom to a carrier (3). The controlled drive of the permanent magnets (17) in the take-over arrangement (15) is performed by means of pneumatic piston/cylinder arrangements (19).</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| subjects | BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING |
| title | TRANSPORT AND HANDING-OVER ARRANGEMENT FOR DISC-SHAPED SUBSTRATES, VACUUM TREATMENT INSTALLATION AND METHOD FOR MANUFACTURE OF TREATED SUBSTRATES |
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