OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is diff...
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| creator | LAURENT, THIBAULT PIETERSE, GERBEN POLET, THEODORUS LEMPENS, HAN JACOBS, JOHANNES TROMP, SIEGFRIED SIMONS, WILHELMUS CORTIE, ROGIER VY, VAN VUONG LAFARRE, RAYMOND OVERKAMP, JIM HOUBEN, MARTIJN STEFFENS, KOEN BLOKS, RUUD |
| description | An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is different to a second material defining the passageway. |
| format | Patent |
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LEMPENS, HAN ; JACOBS, JOHANNES ; TROMP, SIEGFRIED ; SIMONS, WILHELMUS ; CORTIE, ROGIER ; VY, VAN VUONG ; LAFARRE, RAYMOND ; OVERKAMP, JIM ; HOUBEN, MARTIJN ; STEFFENS, KOEN ; BLOKS, RUUD</creatorcontrib><description>An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is different to a second material defining the passageway.</description><language>eng ; fre ; ger</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; CINEMATOGRAPHY ; ELECTROGRAPHY ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS</subject><creationdate>2015</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150408&DB=EPODOC&CC=EP&NR=2856261A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76294</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150408&DB=EPODOC&CC=EP&NR=2856261A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>LAURENT, THIBAULT</creatorcontrib><creatorcontrib>PIETERSE, GERBEN</creatorcontrib><creatorcontrib>POLET, THEODORUS</creatorcontrib><creatorcontrib>LEMPENS, HAN</creatorcontrib><creatorcontrib>JACOBS, JOHANNES</creatorcontrib><creatorcontrib>TROMP, SIEGFRIED</creatorcontrib><creatorcontrib>SIMONS, WILHELMUS</creatorcontrib><creatorcontrib>CORTIE, ROGIER</creatorcontrib><creatorcontrib>VY, VAN VUONG</creatorcontrib><creatorcontrib>LAFARRE, RAYMOND</creatorcontrib><creatorcontrib>OVERKAMP, JIM</creatorcontrib><creatorcontrib>HOUBEN, MARTIJN</creatorcontrib><creatorcontrib>STEFFENS, KOEN</creatorcontrib><creatorcontrib>BLOKS, RUUD</creatorcontrib><title>OBJECT HOLDER AND LITHOGRAPHIC APPARATUS</title><description>An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is different to a second material defining the passageway.</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>CINEMATOGRAPHY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2015</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNDwd_JydQ5R8PD3cXENUnD0c1Hw8Qzx8HcPcgzw8HRWcAwIcAxyDAkN5mFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8a4BRhamZkZmho6GxkQoAQC6_COq</recordid><startdate>20150408</startdate><enddate>20150408</enddate><creator>LAURENT, THIBAULT</creator><creator>PIETERSE, GERBEN</creator><creator>POLET, THEODORUS</creator><creator>LEMPENS, HAN</creator><creator>JACOBS, JOHANNES</creator><creator>TROMP, SIEGFRIED</creator><creator>SIMONS, WILHELMUS</creator><creator>CORTIE, ROGIER</creator><creator>VY, VAN VUONG</creator><creator>LAFARRE, RAYMOND</creator><creator>OVERKAMP, JIM</creator><creator>HOUBEN, MARTIJN</creator><creator>STEFFENS, KOEN</creator><creator>BLOKS, RUUD</creator><scope>EVB</scope></search><sort><creationdate>20150408</creationdate><title>OBJECT HOLDER AND LITHOGRAPHIC APPARATUS</title><author>LAURENT, THIBAULT ; 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| language | eng ; fre ; ger |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| title | OBJECT HOLDER AND LITHOGRAPHIC APPARATUS |
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