METHOD FOR FIXATION OF A MOVABLE COMPONENT OF A MICRO-MECHANICAL STRUCTURAL ELEMENT

METHOD FOR FIXATION OF A MOVABLE COMPONENT OF A MICRO-MECHANICAL STRUCTURAL ELEMENT

The present invention relates to a method for fixation of a first movable component (4) of a micro-mechanical structural element to a stationary or moving second component (5) of the structural element, wherein a lateral surface of the first component and a lateral surface of the second component fa...

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Hauptverfasser: BERTZ, ANDREAS, SCHULZ, STEFAN, E
Format: Patent
Sprache:eng ; fre ; ger
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MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
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creator BERTZ, ANDREAS
SCHULZ, STEFAN, E
description The present invention relates to a method for fixation of a first movable component (4) of a micro-mechanical structural element to a stationary or moving second component (5) of the structural element, wherein a lateral surface of the first component and a lateral surface of the second component face one another. In the method, a layer (10) protruding from the lateral surface is produced on a side of one or both components (4, 5) adjoining the lateral surface. The movable first component is moved (4) for fixation against the second component (5) in such a manner that the protruding layer area slides over the side of the first or second component (4, 5) adjoining the lateral side or, in the case of a protruding layer (10) present on both components (4, 5), the protruding layer areas slide one over another such that, due to static friction, the protruding layer area (10) adheres to the component (4, 5) thereunder, or the protruding layer areas adhere to one another. With the proposed method it is possible to subsequently reduce gap widths between a movable structure element and a fixed or movable structure element with little effort.
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subjects MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
title METHOD FOR FIXATION OF A MOVABLE COMPONENT OF A MICRO-MECHANICAL STRUCTURAL ELEMENT
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