Use of electrostatic objective lens in an electron microscope

The invention relates to the use of a scanning electron microscope column equipped with a electron source for producing a beam (100) of electrons, an electrostatic immersion objective lens for focusing the beam on a sample (102), and a detector (116) at the source side of the objective lens for dete...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SKALICKY, JAN, TUMA, LUBOMÍR, SYTAR, PETR
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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