CAPACITIVE MICRO-MACHINED ULTRASOUND TRANSDUCER DEVICE WITH CHARGING VOLTAGE SOURCE

CAPACITIVE MICRO-MACHINED ULTRASOUND TRANSDUCER DEVICE WITH CHARGING VOLTAGE SOURCE

The present invention relates to a capacitive micro-machined ultrasound transducer (CMUT) device (1) for transmitting and/or receiving ultrasound waves, comprising at least one CMUT cell (10). The CMUT cell (10) comprises a substrate (13) comprising a first electrode (22), a membrane (15) comprising...

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1. Verfasser: BROCK-FISHER, GEORGE ANTHONY
Format: Patent
Sprache:eng ; fre ; ger
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES
MEASURING
PHYSICS
TESTING
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creator BROCK-FISHER, GEORGE ANTHONY
description The present invention relates to a capacitive micro-machined ultrasound transducer (CMUT) device (1) for transmitting and/or receiving ultrasound waves, comprising at least one CMUT cell (10). The CMUT cell (10) comprises a substrate (13) comprising a first electrode (22), a membrane (15) comprising a second electrode (20), at least one dielectric layer (21, 23) between the first electrode (22) and the second electrode (20), and a cavity (18) formed between the substrate (13) and the membrane (15). The CMUT device (1) further comprises an operating bias voltage source (25) for supplying an operating bias voltage (VB) of a first polarity between the first and second electrode (20, 22) during transmitting and/or receiving ultrasound waves, and a charging voltage source (30) for supplying an additional charging voltage (VC) between the first and second electrode (20, 22), the second polarity being the reverse polarity of the first polarity. The present invention further relates to a method of operating such a CMUT device.
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The CMUT cell (10) comprises a substrate (13) comprising a first electrode (22), a membrane (15) comprising a second electrode (20), at least one dielectric layer (21, 23) between the first electrode (22) and the second electrode (20), and a cavity (18) formed between the substrate (13) and the membrane (15). The CMUT device (1) further comprises an operating bias voltage source (25) for supplying an operating bias voltage (VB) of a first polarity between the first and second electrode (20, 22) during transmitting and/or receiving ultrasound waves, and a charging voltage source (30) for supplying an additional charging voltage (VC) between the first and second electrode (20, 22), the second polarity being the reverse polarity of the first polarity. 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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES
MEASURING
PHYSICS
TESTING
title CAPACITIVE MICRO-MACHINED ULTRASOUND TRANSDUCER DEVICE WITH CHARGING VOLTAGE SOURCE
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