ENHANCED RE-HOSTING CAPABILITY FOR LEGACY HARDWARE AND SOFTWARE
Power supply system (600) supplies power to a semiconductor processing system (200). AC power (610) is converted to DC. The DC current is provided to the semiconductor processing system and also charges a back-up battery (615). Current parameters, parameters of a fan (625) or other parameters are mo...
Gespeichert in:
Hauptverfasser: | , , , |
---|---|
Format: | Patent |
Sprache: | eng ; fre ; ger |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!