ENHANCED RE-HOSTING CAPABILITY FOR LEGACY HARDWARE AND SOFTWARE

Power supply system (600) supplies power to a semiconductor processing system (200). AC power (610) is converted to DC. The DC current is provided to the semiconductor processing system and also charges a back-up battery (615). Current parameters, parameters of a fan (625) or other parameters are mo...

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Bibliographische Detailangaben
Hauptverfasser: COVINGTON, Mark Roger, KUMARASWAMI, Suresh, SCHAUER, Ronald Vern, PURI, Amitabh
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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